发明名称 METALIZATION FILM MANUFACTURING METHOD AND METALIZATION FILM MANUFACTURING APPARATUS
摘要 PROBLEM TO BE SOLVED: To provide a metalization film manufacturing method and a metalization film manufacturing apparatus which enable a margin of a metal electrode film to be easily formed, prevent moisture and dust in the atmosphere from being taken in, and achieve low cost.SOLUTION: A metalization film manufacturing method includes: a first process where an oil layer 51 is formed on one surface of a long sheet like substrate S; a second process where an Al electrode film 61 is formed using the oil layer as a mask and the oil layer is vaporized; a third process where Zn electrode films 71, extending in a longitudinal direction, are formed on a surface of the Al electrode film at certain intervals in a width direction of the substrate; and a fourth process where a liquid resin is disposed in a space between the Zn electrode film and the adjacent Zn electrode film and the liquid resin disposed therebetween is cured to form a dielectric film 81. The first process, the second process, the third process, and the fourth process are repeatedly carried out in this order.
申请公布号 JP2013145828(A) 申请公布日期 2013.07.25
申请号 JP20120006112 申请日期 2012.01.16
申请人 ULVAC JAPAN LTD 发明人 YO ITSUSHIN;NAKAMURA KYUZO;MORIMOTO KAZUYUKI;SHIMOMURA MAKOTO;HAYASHI NOBUHIRO;HIRANO HIROYUKI
分类号 H01G4/18 主分类号 H01G4/18
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