DOPANT ADSORPTIVE COMPONENT, AND SOLAR BATTERY MANUFACTURING METHOD

摘要

PROBLEM TO BE SOLVED: To provide a dopant adsorptive component which is used in applying or printing dopant onto a semiconductor substrate to form an impurity diffusion layer by thermal diffusion and serves as a tool for reducing the amount of dopant spreading to a surface of the semiconductor substrate opposite to the surface having the applied or printed dopant.SOLUTION: In heat treatment for diffusing dopant to form an emitter layer or BSF layer on a semiconductor substrate for producing a solar battery cell, a dopant adsorptive component having a plate-like, block-like or granular shape serves as a tool for preventing contamination of the semiconductor substrate. A surface of the dopant adsorptive component has many fine cracks 602 or holes 603 adsorbing the dopant scattered during the heat treatment.