发明名称 METHOD FOR MANUFACTURING ORGANIC THIN FILM ON SUBSTRATE
摘要 PROBLEM TO BE SOLVED: To manufacture a clean organic thin film free from liquid stains and liquid-flow marks on a substrate surface.SOLUTION: A method for manufacturing an organic thin film is characterized by comprising: (a) placing a substrate having a hydrophilic surface on a horizontal table or rotatable horizontal table and fixing the substrate to the table; (b) dropping a solution for forming an organic thin film having a water-repellent group onto the substrate just in an amount sufficient for covering the substrate surface; (c) tilting or rotating the table to remove the excess solution for organic thin film formation after allowing the substrate to stand for a period of time sufficient to enable the solution to form an organic film on the substrate; and then, if necessary, (d) tilting or rotating the table to remove a cleaning solvent after dropping the cleaning solvent onto the substrate and holding the substrate for a certain period of time.
申请公布号 JP2013144297(A) 申请公布日期 2013.07.25
申请号 JP20130095926 申请日期 2013.04.30
申请人 NIPPON SODA CO LTD 发明人 SHIMADA MIKIYA
分类号 B05D1/40 主分类号 B05D1/40
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