| 摘要 |
PROBLEM TO BE SOLVED: To provide a drive circuit of a piezoelectric actuator, capable of reducing the load on the piezoelectric actuator to prevent occurrence of failure when driving the actuator with a drive voltage involving a rising edge or falling edge.SOLUTION: There is provided a drive circuit 10 of a piezoelectric actuator applying a drive voltage involving a rising edge or falling edge. The voltage having only the frequency component below the mechanical resonance frequency of the piezoelectric actuator 15 is applied to the actuator 15, with the wave pattern starting from the angle of inclination 0 in a rising edge or falling edge. Thus, the change of the voltage in the rising or falling edge becomes slow. As a result, a load on the actuator 15 is reduced, and the durability is improved. Thus, the above drive circuit can be effectively applied, for example, to that of the piezoelectric actuator used for opening/closing of a valve. |
