| 摘要 |
Provided are a radiation emission target and a radiation generating apparatus that reduce the variation in the output due to operation and temperature history by maintaining stable adhesion of the layered radiation target and achieve stable radiation emission characteristics. The radiation target includes a supporting substrate, a target layer that emits a radiation when irradiated with an electron beam, and an interlayer located between the supporting substrate and the target layer. The interlayer has a thickness of 1 mum or less and contains titanium as a main component. At least part of the titanium shows the beta-phase at 400° C. or less.
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