| 摘要 |
PROBLEM TO BE SOLVED: To adjust a plurality of plate-like articles to a desired thickness, to improve productivity, and to reduce costs.SOLUTION: A method of grinding a plate-like article includes: a step of dividing a plurality of disk plate-like articles (W) into sector individual pieces (W1); a step of arranging the plurality of sector individual pieces (W1) in a rectangular frame shape and adhering the plurality of sector individual pieces (W1) to a pressure sensitive adhesive tape (92) so that a perfect circle (C) may be drawn between an inner circumferential edge and an outer circumferential edge; a step of holding the plurality of sector individual pieces (W1) so that the center of the perfect circle (C) is positioned at a rotation center of a chuck table (31); and a step of rotating the chuck table (31) while a height gauge (51) is positioned at the perfect circle (C) and grinding the plurality of sector individual pieces (W1) by a grinding unit (4) on the basis of a measurement result by the height gauge (51). |
