发明名称 |
Inspection Equipment and Inspection Method |
摘要 |
Foreign metal inspection equipment is provided with: a conveying device for conveying a sample to be subjected to inspection; electrodes positioned so as to face the surface of the sample; a measurement device for measuring the capacitance between the electrodes and the sample being conveyed by the conveying device; and a processing unit that inspects for foreign metal mixed in the sample on the basis of the change in capacitance measured by the measurement device.
|
申请公布号 |
US2013187667(A1) |
申请公布日期 |
2013.07.25 |
申请号 |
US201113701678 |
申请日期 |
2011.06.17 |
申请人 |
MAKUUCHI MASAMI;NOGUCHI MINORI;KAWAGUCHI HIROSHI;HITACHI HIGH-TECHNOLOGIES CORPORATION |
发明人 |
MAKUUCHI MASAMI;NOGUCHI MINORI;KAWAGUCHI HIROSHI |
分类号 |
G01N27/24 |
主分类号 |
G01N27/24 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|