发明名称 STAMPER, IMPRINTING DEVICE AND PROCESSED PRODUCT, AS WELL AS PROCESSED PRODUCT MANUFACTURING DEVICE AND PROCESSED PRODUCT MANUFACTURING METHOD
摘要 PROBLEM TO BE SOLVED: To provide a stamper or imprinting device capable of reducing unevenness in base film thickness, a processed product having a highly precise micropattern, and a processed product manufacturing device or processed product manufacturing method capable of forming a highly precise micropattern.SOLUTION: The present invention provides a stamper or an imprinting device which performs imprinting using the stamper, a processed product manufacturing device or processed product manufacturing method for manufacturing a processed product using the imprinting, and a manufactured processed product. The stamper possesses a drain structure which absorbs surplus molding material which became surplus when performing a function of the processed product formed of a base material of the processed product.
申请公布号 JP2013145616(A) 申请公布日期 2013.07.25
申请号 JP20120005246 申请日期 2012.01.13
申请人 HITACHI HIGH-TECHNOLOGIES CORP 发明人 HATOKAI TETSUHIRO;MORI KYOICHI
分类号 G11B5/84;B29C59/02;H01L21/027 主分类号 G11B5/84
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