发明名称 |
STAMPER, IMPRINTING DEVICE AND PROCESSED PRODUCT, AS WELL AS PROCESSED PRODUCT MANUFACTURING DEVICE AND PROCESSED PRODUCT MANUFACTURING METHOD |
摘要 |
PROBLEM TO BE SOLVED: To provide a stamper or imprinting device capable of reducing unevenness in base film thickness, a processed product having a highly precise micropattern, and a processed product manufacturing device or processed product manufacturing method capable of forming a highly precise micropattern.SOLUTION: The present invention provides a stamper or an imprinting device which performs imprinting using the stamper, a processed product manufacturing device or processed product manufacturing method for manufacturing a processed product using the imprinting, and a manufactured processed product. The stamper possesses a drain structure which absorbs surplus molding material which became surplus when performing a function of the processed product formed of a base material of the processed product. |
申请公布号 |
JP2013145616(A) |
申请公布日期 |
2013.07.25 |
申请号 |
JP20120005246 |
申请日期 |
2012.01.13 |
申请人 |
HITACHI HIGH-TECHNOLOGIES CORP |
发明人 |
HATOKAI TETSUHIRO;MORI KYOICHI |
分类号 |
G11B5/84;B29C59/02;H01L21/027 |
主分类号 |
G11B5/84 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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