| 摘要 |
PROBLEM TO BE SOLVED: To house a plate-like workpiece set in a cassette and easily peel a sheet and resin from a plate-like workpiece, in the plate-like workpiece set in which the sheet is adhered to the plate-like workpiece via the resin.SOLUTION: A sheet is suction-held on a holding table, and liquid resin is supplied from above the sheet. A pressing part suction-holding a plate-like workpiece is lowered toward the holding table, so as to pressurize the liquid resin and enlarge it on the sheet. The liquid resin is radiated with light to harden the liquid resin. A sheet S and resin R1 are cut along an outer periphery of a plate-like workpiece W, and one part of the sheet S and the resin R1 is cut to protrude toward an outer peripheral side than the outer periphery of the plate-like workpiece W, so as to make a plate-like workpiece set WS on which a grip part 100 is formed. The grip part 100 is gripped, so as to easily peel the sheet S and the resin R1 from the plate-like workpiece. |
