| 摘要 |
PROBLEM TO BE SOLVED: To provide a method of manufacturing a liquid ejection head, the method capable of forming a liquid supply port with high accuracy of an aperture position, by reducing occurrence of tilt when forming the liquid supply port in a bottom of a cavity of a silicon substrate.SOLUTION: A method includes the steps of: (1) forming a cavity in a silicon substrate by a first crystal anisotropic etching; (2) forming a chemical leading hollow in a slope of the cavity; (3) expanding the cavity by a second crystal anisotropic etching; and (4) forming the liquid supply port 102 in a bottom surface of the cavity by dry etching with the use of ion, in this order. |
