| 摘要 |
PROBLEM TO BE SOLVED: To provide a transferring method capable of transferring even a fragile workpiece from above a chuck table without breakage.SOLUTION: A transferring method for transferring a fragile workpiece comprises: a grinding step of grinding a first face of the fragile workpiece held by a chuck table with a grind stone, and thinning the fragile workpiece to predetermined thickness; a close contact cancelling step of emitting a fluid from a holding face of the chuck table and separating the fragile workpiece suction-held by transferring means from the chuck table at a first speed; and a carrying step for separating the transferring means from the chuck table at a second speed faster than the first speed, and carrying the fragile workpiece from above the chuck table. |
