ELECTRO-ACTIVE MICROELECTROMECHANICAL DEVICE AND CORRESPONDING DETECTION PROCESS

摘要

An electroactive microelectromechanical device of the Artificial Hair Cell type includes a moving cilium structure having a substrate and a cantilever, partly or entirely in piezoelectric material, subject to bending or deformation following the action of a force and/or an applied voltage. The cantilever includes a multilayer inducing a stress-driven geometry in which a portion of the cantilever lies outside of a plane defined by the substrate. According to the invention, the cantilever is associated to a piezoresistive element, in particular of piezoresistive material configured to measure the bending or deformation of the cantilever.