| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a laser beam machining apparatus and a laser beam machining method capable of accurately emitting a laser beam while a warp generated in a workpiece is corrected. <P>SOLUTION: In the laser beam machining apparatus 1 that forms a reformed region inside a workpiece 10 in which multiple devices 10a are formed on the surface, the apparatus includes: a holding means 2 having a recess 21a which oppositely faces the region with the devices 10a formed on the surface of the workpiece 10, and having an outer circumferential part 21b which is erected in a manner surrounding the recess 21a and which has an annular holding face for holding in contact a region in which the device 10a installed in the periphery of the workpiece 10 surface is not formed; a displacement detecting means 4 for detecting displacement of the workpiece 10; a pressure adjusting means 7 for adjusting a pressure inside a space 102 that is formed by the workpiece 10, the recess 21a and the outer circumferential part 21b; and a laser beam irradiation means that irradiates the rear face of the workpiece 10 with a laser beam having a wavelength passing through the workpiece. <P>COPYRIGHT: (C)2010,JPO&INPIT</p> |
