METHOD OF LATERALLY GROWING CARBON NANO TUBES AND INTERAL INTERCONNECT USING THE SAME

摘要

PURPOSE: A method of horizontally growing carbon nanotube and a horizontal line formed by using the same are provided to improve productivity by simplifying a manufacturing process. CONSTITUTION: A catalytic dot (110) is formed to grow carbon nanotube on a substrate (100). A first sacrificial layer (120) is formed to form multiple nanochannels including an area in which the catalytic dot is formed. A second sacrificial layer (130') is formed on the upper part of the first sacrificial layer. The nanochannel is formed by removing the first sacrificial layer. The carbon nanotube is grown up through the nanochannel.