| 摘要 |
PURPOSE: A splash guard for a high-flow vacuum bubbler vessel is provided to use a container regardless of the level of chemicals charged in the container and to reduce a down time of a semiconductor tool. CONSTITUTION: A splash guard for a high-flow vacuum bubbler vessel comprises a diptube inlet, a baffle disc (24), a deflector ridge (22), a shoulder (21), and a level sensor (28). The diptube inlet is extended to near the base of a container. The baffle disc is a cone-shaped body opened downward thinly. The deflector ridge is protruded inward from the side wall of the container. The shoulder is protruded inward under the innermost edge of the deflector ridge. The level sensor is extended to near the base of the container. Liquid is charged above the end of the level sensor in the container.
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