发明名称 |
Calibration of micro-mirror arrays |
摘要 |
<p>Described herein is a built-in self-calibration system and method for a micro-mirror array device, for example, operating as a variable focal length lens. The calibration method comprises determining a capacitance value for each micro-mirror element in the array device at a number of predetermined reference angles (530) to provide a capacitance-reference angle relationship (540). From the capacitance values, an interpolation step (550) is carried to determine intermediate tilt angles for each micro-mirror element in the array. A voltage sweep is applied to the micro-mirror array and capacitance values, for each micro-mirror element in the array, are measured (560). For a capacitance value that matches one of the values in the capacitance-reference angle relationship, the corresponding voltage is linked to the associated tilt angle to provide a voltage-tilt angle characteristic which then stored in a memory for subsequent use (570).</p> |
申请公布号 |
EP2618201(A1) |
申请公布日期 |
2013.07.24 |
申请号 |
EP20120152010 |
申请日期 |
2012.01.20 |
申请人 |
IMEC |
发明人 |
JAYAPALA, MURALI;VAN DER PLAS, GEERT;ROCHUS, VERONIQUE;ROTTENBERG, XAVIER;SEVERI, SIMONE;DONNAY, STEPHANE |
分类号 |
G02B26/08;G02B6/35 |
主分类号 |
G02B26/08 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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