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经营范围
发明名称
CLEANING GAS
摘要
申请公布号
EP2505687(A4)
申请公布日期
2013.07.24
申请号
EP20100834490
申请日期
2010.11.19
申请人
CENTRAL GLASS COMPANY, LIMITED
发明人
TAKADA, NAOTO;MORI, ISAMU
分类号
C23C16/44;B08B7/00;C23C14/00;C23C14/14;C23C14/56;C23C16/06;H01L21/31
主分类号
C23C16/44
代理机构
代理人
主权项
地址
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