Accelerometer

摘要

The invention provides for an accelerometer comprising a proof mass 10 within a fixed substrate 12 wherein the proof mass is connected to the substrate by one or more v-beams 14. Acceleration is determined by measuring the deflection of the v-beam or beams. A gold coating reflective mirror 16 is attached to the v-beam, and an optical analyser 18 detects movement of the beam.