| 摘要 |
A piezoelectric element comprising a first electrode, a piezoelectric layer which contains lead, zirconium, and titanium, and which is formed above the first electrode, and a second electrode formed above the piezoelectric layer. A groove which exists between grains in the second electrode side surface of the piezoelectric layer, satisfies 0@d/rho@0.900 (where d: depth of groove, w: width of groove, rho: radius of curvature (d2+w2/4)/2d).
|
