| 摘要 |
PURPOSE: A slit coater system is provided to minimize working hours and the loss of medicinal fluid, to enhance process efficiency and to cut process costs. CONSTITUTION: A slit coater system comprises a stage a workpiece is mounted on, a slit nozzle coating medicinal fluid on the surface of subject, a syringe (210) storing and supplying the medicinal fluid to the slit nozzle, a syringe driver (220) controlling reciprocation motion of a piston in the syringe and the first supply route of medicinal fluid connected between the silt nozzle and the syringe. The syringe is detached from the first supply route of medicinal fluid and the syringe driver by the first separation of the one end from a connection unit (163) of the first supply route of medicinal fluid and by the second separation of the other end from the syringe driver. |
