| 摘要 |
In an angular velocity sensor, there is generated a first parasitic capacitance generated between a first driving electrode and a sensing electrode, and there is generated a second parasitic capacitance generated between a second driving electrode and the sensing electrode. The ratio of the amplitude of a first drive signal to the amplitude of a second drive signal is set to the reciprocal of the ratio of the first parasitic capacitance to the second parasitic capacitance. This allows the noise contents generated by capacitive coupling to be efficiently offset, thereby improving detection accuracy of an angular velocity sensing signal.
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