| 摘要 |
A test apparatus comprising a position information acquiring section that acquires position information concerning first terminals on a surface of a device under test and position information concerning second terminals on a surface of a probe card used for testing the device under test; a control section that calculates a displacement amount between each first terminal and a corresponding second terminal, based on the position information concerning the first terminals and the position information concerning the second terminals, and determines relative positions of the device under test and the probe card such that a maximum value from among the calculated displacement amounts is less than a predetermined value; and an aligning section that adjusts the relative positions of the device under test and the probe card, based on a signal from the control section, and electrically connects the device under test to the probe card.
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