发明名称 Measurement apparatus and measurement method
摘要 There is provided a measuring apparatus including a space arrangement structure that includes space regions surrounded by conductors in a plane, an electromagnetic wave emitter that emits electromagnetic waves towards an object held by the space arrangement structure, and an electromagnetic wave detector that measures the electromagnetic waves that have passed through the space arrangement structure. Here, characteristics of the object are measured by measuring the electromagnetic waves that have passed through the space arrangement structure. The electromagnetic waves emitted from the electromagnetic wave emitter towards the space arrangement structure are incident on the plane containing the space regions at an angle, and the electromagnetic waves that have passed through the space arrangement structure are measured.
申请公布号 US8492718(B2) 申请公布日期 2013.07.23
申请号 US201213485686 申请日期 2012.05.31
申请人 OGAWA YUICHI;HAYASHI SHINICHIRO;KATO EIJI;ADVANTEST CORPORATION 发明人 OGAWA YUICHI;HAYASHI SHINICHIRO;KATO EIJI
分类号 G01T1/17;G01T7/00 主分类号 G01T1/17
代理机构 代理人
主权项
地址
您可能感兴趣的专利