Method of fabricating an integrated electronic circuit with programmable resistance cells

摘要

Method of fabricating an integrated electronic circuit with programmable resistance cells, which comprises providing a substrate; forming an inert electrode; forming a solid electrolyte on the inert electrode; forming an interlayer on the solid electrolyte, the interlayer comprising an active electrode material and nitrogen; and forming an active electrode on the interlayer, the active electrode comprising the active electrode material.