发明名称 |
Method and structure for automated inert gas charging in a reticle stocker |
摘要 |
At least a first reticle is stored in a housing of a stocker. A first gas is delivered to the housing. At least one reticle pod having an additional reticle is delivered into a enclosure within the housing of the stocker. A second gas different from the first gas is delivered to the enclosure. The reticle pod is automatically retrieved from the enclosure. The delivery and retrieval of the reticle pod and delivery of the first gas and the second gas are automatically controlled.
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申请公布号 |
US8492283(B2) |
申请公布日期 |
2013.07.23 |
申请号 |
US20080016791 |
申请日期 |
2008.01.18 |
申请人 |
CHEN YUNG-HO;TSOU WEN-CHIEH;HUANG CHIH-WEI;WANG WEI-CHENG;TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD. |
发明人 |
CHEN YUNG-HO;TSOU WEN-CHIEH;HUANG CHIH-WEI;WANG WEI-CHENG |
分类号 |
H01L21/302;B65B21/02;B65B69/00;B65G65/04;B65G65/34;G06F19/00;H01L21/461 |
主分类号 |
H01L21/302 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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