发明名称 |
Particle detection sensor, method for manufacturing particle detection sensor, and method for detecting particle using particle detection sensor |
摘要 |
A compact sensor with which particles floating in the air can be easily detected. A sensor having a microstructure which detects a detection object by contact is used. A microstructure has an opening to be a detection hole corresponding to the size of a detection object, and a pair of electrodes having a bridge structure are provided thereabove or thereunder so as to partially contact with each other.
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申请公布号 |
US8492172(B2) |
申请公布日期 |
2013.07.23 |
申请号 |
US20090609328 |
申请日期 |
2009.10.30 |
申请人 |
YAMAGUCHI MAYUMI;IZUMI KONAMI;TATEISHI FUMINORI;SEMICONDUCTOR ENERGY LABORATORY CO., LTD. |
发明人 |
YAMAGUCHI MAYUMI;IZUMI KONAMI;TATEISHI FUMINORI |
分类号 |
H01L21/00;H01L27/14 |
主分类号 |
H01L21/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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