发明名称 SOLDERBALL ATTACH METHOD AND APPARATUS USING SAME
摘要 PURPOSE: A solder ball attach method and an apparatus thereof are provided to maintain uniform size of a completed bump by excluding physical contact in the process of settling a solder ball in an accommodation hole of an attach mask. CONSTITUTION: A substrate is fixed to a substrate chuck. Flux is dotted in a number of positions which are pattern-arranged to settle a solder ball (mB) in the substrate. An attach mask (90) is fixed to the upper side of the substrate as being arranged. A number of solder balls are dropped down on the surface of the attach mask of the substrate chuck from a solder ball supply unit (140). The substrate chuck vibrates so that the solder ball dropped on the surface of the attach mask is settled in an accommodation hole. The attach mask is separated by being moved separately from the substrate.
申请公布号 KR20130083529(A) 申请公布日期 2013.07.23
申请号 KR20120004151 申请日期 2012.01.13
申请人 KOREA SEMICINDUCTOR SYSTEM CO., LTD. 发明人 KIM, JONG HOI
分类号 H01L21/60 主分类号 H01L21/60
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