发明名称 Positioning unit and alignment device for an optical element
摘要 The disclosure provides a positioning unit for an optical element in a microlithographic projection exposure installation having a first connecting area for connection to the optical element, and having a second connecting area for connection to an object in the vicinity of the optical element.
申请公布号 US8493674(B2) 申请公布日期 2013.07.23
申请号 US201313751284 申请日期 2013.01.28
申请人 CARL ZEISS SMT GMBH 发明人 KUGLER JENS;WEBER ULRICH
分类号 G02B7/02;G02B7/182;G03F7/20 主分类号 G02B7/02
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