| 摘要 |
PURPOSE: A vacuum heat treatment apparatus is provided to efficiently perform a heat treatment of metal and nonmetal materials with high purity under a high-degree vacuum state. CONSTITUTION: A vacuum heat treatment apparatus comprises a furnace(110), a vacuum chamber(120), a gas controller(130), a vacuum controller(140), and a temperature controller(150). The furnace comprises a heater(111) which comprises quartz pipes to rapidly heat materials. The vacuum chamber is formed in the furnace, and comprises a plurality of gas discharge holes. The gas controller controls a gas feeder(131) connected to a gas supply nozzle. The vacuum controller controls the pressure and vacuum degree of the vacuum chamber. The temperature controller controls the temperature and cooling velocity of the furnace by stages. [Reference numerals] (123) Cooler; (130) Gas controller; (131) Gas supplier; (140) Vacuum controller; (141) Vacuum pump; (150) Temperature controller |
