发明名称 |
Pattern transfer method and imprint device |
摘要 |
In order to allow for aligning a relative position between a transferred object and a stamper with high accuracy without providing an alignment pattern in the transferred object, there are provided: a pattern transfer method, including: when adjusting the relative position between the stamper and the transferred object, a step of detecting at least two or more edge positions of the transferred object and calculating an arbitrary point from the detected edge positions; a step of detecting a position of the stamper from an edge of the stamper or an alignment mark formed in the stamper; and a step of adjusting the relative position between the transferred object and the stamper from the arbitrary point and the position of the stamper; and an imprint device using the same.
|
申请公布号 |
US8491291(B2) |
申请公布日期 |
2013.07.23 |
申请号 |
US201213366792 |
申请日期 |
2012.02.06 |
申请人 |
ANDO TAKASHI;KOMORIYA SUSUMU;OGINO MASAHIKO;MIYAUCHI AKIHIRO;HITACHI, LTD. |
发明人 |
ANDO TAKASHI;KOMORIYA SUSUMU;OGINO MASAHIKO;MIYAUCHI AKIHIRO |
分类号 |
B29C59/16 |
主分类号 |
B29C59/16 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|