| 摘要 |
Disclosed is an inkjet head including a channel substrate; a multi-interconnect structure formed on the channel substrate, including a vibration layer, plural piezoelectric elements each including a first electrode, a piezoelectric layer and a second electrode, and a common electrode interconnect electrically connected to the first electrode including a first common electrode interconnect and a second common electrode interconnect which has a thickness thicker than that of the first common electrode interconnect; and a support substrate bonded to the channel substrate through the multi-interconnect structure, the support substrate being provided with a first concave portion at a surface facing the channel substrate at an area corresponding to the second common electrode interconnect to accommodate the second common electrode interconnect.
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