| 摘要 |
PROBLEM TO BE SOLVED: To obtain a closeup X-ray image taken at required magnification.SOLUTION: A composite inspection apparatus that comprises an optical imaging device 300 facing an inspection object part between an X-ray camera 50 and an X-ray irradiation unit 160 is provided with magnification change means 155 for changing magnification of an X-ray image by relatively displacing the X-ray irradiation unit 160 and the X-ray camera 50 between a closeup position and a non-closeup position. With respect to the magnification change means 155, an access route of an X-ray reaching the X-ray camera 50 from the X-ray irradiation unit 160 is shorter for closeup at the closeup position. At the non-closeup position, the access route is longer than the distance at the closeup position. When at least one of the X-ray irradiation unit and the X-ray camera needs to move toward the closeup position, the optical imaging device 300 is evacuated preliminarily so that the X-ray irradiation unit and the X-ray camera can relatively move toward the closeup position. |
