PIEZOELECTRIC VIBRATION ELEMENT, PIEZOELECTRIC VIBRATION ELEMENT MANUFACTURING METHOD, PIEZOELECTRIC VIBRATOR, ELECTRONIC DEVICE, AND ELECTRONIC APPARATUS

摘要

PROBLEM TO BE SOLVED: To obtain a piezoelectric vibration element which has a high frequency fundamental wave and is compact, and which has a small main vibration CI value and a large spurious to CI value ratio.SOLUTION: A piezoelectric vibration element 1 comprises: a piezoelectric substrate 10 having a thin vibration region 12 and a thick portion integrated with three sides except one side of the vibration region 12; excitation electrodes 25a and 25b respectively disposed on the surface and the reverse side of the vibration region 12; and lead electrodes 27a and 27b. The thick portion consists of a first thick portion 14 and a second thick portion 16 oppositely disposed across the vibration region 12 and a third thick portion 18 continuously formed between the base ends of the first and the second thick portions. The second thick portion 16 includes an inclined portion 16b continuous to one side of the vibration region 12, a body of second thick portion 16a continuous to the other side of the inclined portion 16b, and at least one stress relief slit 20.