IMPURITY PARTICLE MEASURING DEVICE

摘要

PROBLEM TO BE SOLVED: To provide an impurity particle measuring device which can accurately measure the amount of impurity particles flowing through a channel and which achieves the improvement in heat resistance and life characteristics.SOLUTION: An impurity particle measuring device which is for measuring impurity particles such as oil dust includes: a light emitting diode 20 irradiating a channel 10 for letting a desired fluid flow with light; two light receiving elements 30 which are separately arranged in a direction of the channel of the fluid and which detect the light passing through the channel 10 by the irradiation of the light; and detectors 44 to 49 detecting the amount of the impurity particles flowing through the channel on the basis of the differential output of each of the light receiving elements 30.