发明名称 ELECTRIC-MECHANICAL CONVERSION ELEMENT, LIQUID DISCHARGING HEAD, DROP DISCHARGING DEVICE, AND IMAGE FORMING DEVICE
摘要 PROBLEM TO BE SOLVED: To provide an electric-mechanical conversion device capable of obtaining efficient deformation displacement.SOLUTION: In an electric-mechanical conversion element, a first electrode is formed on a substrate. An electric-mechanical conversion film is formed on at least a part of the first electrode, and a second electrode is formed on at least a part of the electric-mechanical conversion film. An actuator portion 35 on which layers from a vibration plate 30 as a substrate to an upper electrode 44 as the second electrode are laminated, has stiffness gradually increasing from an end portion of the actuator portion 35 in a lateral direction of the actuator 35 toward a center part thereof. Displacement amount characteristics as substitutive characteristics of the stiffness exist on an outer peripheral surface curved line of a generally meniscus convex lens.
申请公布号 JP2013143456(A) 申请公布日期 2013.07.22
申请号 JP20120002524 申请日期 2012.01.10
申请人 RICOH CO LTD 发明人 MACHIDA OSAMU;AKIYAMA ZENICHI;TASHIRO RYO;SHIMOFUKU HIKARI;OTA HIDEKAZU;OGATA KENICHI
分类号 H01L41/09;H01L41/18;H01L41/187;H01L41/22;H01L41/39 主分类号 H01L41/09
代理机构 代理人
主权项
地址