Ceria based bi-layer electrolyte comprising yttria-stabilized zircornia functional layer formed via atomic layer deposition, and solid oxide fuel cell comprising the same

摘要

PURPOSE: A preparing method of a functional layer-comprising ceria-based electrolyte is provided to minimize resistance loss by depositing an YSZ film with relatively high resistance to oxygen ions into a thin thickness, and to facilitate the thickness control of the functional layer. CONSTITUTION: A preparing method of a functional layer-comprising ceria-based electrolyte comprises a step of forming an YSZ functional layer through an atomic layer deposition. The functional layer formation step consists of repeating 1-30 times of an yttria formation cycle and a zirconia formation cycle. The yttria formation cycle comprises: a step of supplying an yttria precursor into a chamber; a step of purging the chamber; a step of supplying the oxidant into a chamber; and a step of purging the inside of chamber. The zirconia formation cycle comprises: a step of supplying one kind of zirconia precursors into the chamber; a step of purging the chamber; and a step of supplying oxidant into the chamber; and a step of purging the inside of the chamber.