NANO-PIEZOELECTRIC GENERATOR AND METHOD OF MANUFACTURING THE SAME

摘要

PURPOSE: A nano-piezoelectric generator and a manufacturing method thereof are provided to improve piezoelectric efficiency by controlling the concentration of a carrier in a nanostructure. CONSTITUTION: A first electrode (130) and a second electrode (120) are located on a substrate (110) to face each other. At least one of the first electrode and the second electrode includes a silicon substrate with electric resistance. At least one nanostructure (140) is formed between the first electrode and the second electrode. The nanostructure includes a piezoelectric material with semiconductor properties. The nanostructure includes a first carrier. A concentration control unit controls the concentration of the first carrier.