| 摘要 |
PROBLEM TO BE SOLVED: To provide a substrate processing apparatus which moves a head unit to a position protruding to the outer side relative to an end surface of a guide rail without requiring complicated control.SOLUTION: A substrate processing apparatus includes: a head unit 50 performing predetermined processing on a substrate; and a moving device 30 moving the head unit 50 in a uniaxial direction. The moving device 30 has a guide rail 34 and a slide part 35 moving along the guide rail 34. The head unit 50 is fixed to a position that at least a part of the head unit 50 protrudes from an end surface 35A formed in a moving direction, from among the slide part 35, to the outer side. This structure allows the head unit 50 to move to a position protruding to the outer side relative to an end surface of the guide rail 34 without requiring complicated control. |
