| 摘要 |
PROBLEM TO BE SOLVED: To provide a semiconductor integrated element capable of securing both characteristics of a semiconductor light-emitting element part and characteristics of a semiconductor optical modulation element part, and to provide a method of fabricating the same.SOLUTION: In a semiconductor light-emitting element part 1, because a lower stripe mesa 51 including a core layer 512 is implanted by a lower implantation layer 52 consisting of a semi-insulating semiconductor, increase in non-light-emission re-coupling is suppressed. In a semiconductor light-modulation element part 2, because an upper stripe mesa 64 is implanted by an upper implantation layer 68 consisting of a resin material, low capacitance and strong-light confinement are achieved. In this way, due to this semiconductor integrated element 100, both characteristics of the semiconductor light-emitting element part 1 and characteristics of the semiconductor light-modulation element part 2 can be secured. |
