SUBSTRATE PROCESSING APPARATUS

摘要

PURPOSE: A substrate processing device is provided to enable to perform processing work easily, by making at least a part of a head unit be protruded to the outward movement direction of a slide part. CONSTITUTION: A component mounting device comprises a head unit. The head unit transports an electronic component. A supporting part (12) comprises a conveyor (13). A component supply part is comprised in an attachable/detachable space as being attachable and detachable. The component mounting device comprises two frames (20) and arms (30).