| 摘要 |
PROBLEM TO BE SOLVED: To improve inspection accuracy.SOLUTION: A circuit board inspection device includes: a probe unit 12 having a plurality of probe pins (22a, 22b); a measurement unit for measuring a capacitance between each of inspection points P of a circuit board 100; and an inspection unit for inspecting the circuit board 100 on the basis of the measured capacitance. The measurement unit performs: first measurement processing which measures a stray capacitance between each of probe pins to be applied to each of first inspection points (Pa1, Pa2) as measuring objects of the capacitance in a state where probing processing is not performed, and second measurement processing which measures the capacitance when the probing processing is performed in a state where an insulation sheet 13 is not interposed between each first inspection point P and each probe pin and also the insulation sheet 13 is interposed between a second inspection point Pb which is not the measuring object of the capacitance and the probe pin. The inspection unit inspects the circuit board 100 on the basis of the capacitance after subtracting the stray capacitance from the capacitance. |
