PROBE SHAPE EVALUATION METHOD OF SCANNING PROBE MICROSCOPE

摘要

PROBLEM TO BE SOLVED: To evaluate a probe tip shape in a scanning probe microscope.SOLUTION: A probe tip shape is measured in accordance with a probe shape verification sample having a needle-shaped structure, the radiuses of cross sections within a plurality of distances from a tip are calculated and a curvature radius in the case where the probe tip shape is approximated with a circle is calculated based on the radiuses.