发明名称 METHOD FOR PREPARING A SELF-SUPPORTING CRYSTALLIZED SILICON THIN FILM
摘要 The invention relates to a method for preparing a self-supporting crystallized silicon thin film having a grain size of more than 1 mm. The invention also relates to the use of said method for preparing self-supporting silicon bands and to the bands thus obtained.
申请公布号 KR101287525(B1) 申请公布日期 2013.07.19
申请号 KR20117007357 申请日期 2009.09.03
申请人 发明人
分类号 H01L21/20;H01L21/324 主分类号 H01L21/20
代理机构 代理人
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