| 摘要 |
PURPOSE: A circular or elliptic polarization generation apparatus for laser processing and a laser processing method thereof are provided to improve the quality of processing and reduce defect rate by simply transforming a linear polarized or non-polarized laser beam to a circular or elliptic polarization. CONSTITUTION: A laser processing apparatus uniformly processes a certain position of a processing target by irradiating a linear polarized laser beam oscillated from a laser generator on the processing target. The laser processing apparatus includes a rotation device which controls the polarization type by rotating aλ/4 wavelength plate(100') and aλ/4 wavelength plate, which circular-polarizes or elliptic-polarizes a laser beam, to meet either circular polarization conditions or elliptic polarization conditions to achieve a desired polarization type. Theλ/4 wavelength plate and the rotation device are integrated into one unit in a housing. TheΛ/4 wavelength plate has a circular shape and is supported by a hemispherical supporting guide in a rotatable manner. A connecting member downwardly protrudes in the bottom surface of theλ/4 wavelength plate within a range of not interfering polarization, and a rotary motor(210) is installed at a distance from Theλ/4 wavelength. The connecting part and the rotary motor are connected to each other to transfer driving power through a driving power transfer member so that the rotary motor rotates according to a control signal to rotate the /4 wavelength plate to a certain angle. |
