| 摘要 |
<p>PURPOSE: A charged particle beam writing method, a storage medium storing a charged particle beam writing program, and a charged particle beam writing apparatus are provided to improve the throughput and accuracy of a writing operation by optimally setting the time interval of a drift diagnosis. CONSTITUTION: A plurality of time interval patterns to define a time interval for diagnosing the drift amount of charged particle beams are memorized (S1). A preset writing pattern is written on a sample by irradiating the charged particle beams to the sample (S2). First event information including the generation and classification of an event is received (S3). Area information specifying a current writing area is obtained (S4). A specific time interval pattern is selected among the time interval patterns (S5). A drift diagnosis process and a writing correction process are repeated. Second information including the generation and classification of the event is received (S8). [Reference numerals] (S1) Time interval pattern memorizing process; (S2) Writing process; (S3,S8) Event information receiving process; (S4) Reception information obtaining process; (S5) Time interval pattern selecting process; (S6-1,S6-2,S6-n) Drift diagnosing process; (S7-1) Writing and drift correcting process; (S7-2,S7-n) Writing and drift correcting process</p> |
