| 摘要 |
PROBLEM TO BE SOLVED: To provide article storage facility capable of suppressing the consumption of inert gas, and preventing a substrate in a conveying container from being stained.SOLUTION: An article storage facility includes: a conveying means for conveying conveyance containers to storage units in which the conveyance containers for storing substrates are stored; and an inert gas supply unit including a flow rate adjusting device to freely adjust the flow rate of the inert gas discharged from a discharge port with respect to a plurality of the storage units, and freely supply the inert gas into the conveyance containers. A control means H1 brings the storage units in storage supply states when the conveyance containers are stored in the storage units, when the conveyance containers are not stored in the storage units, brings the storage units in supply-suspended states, and in the case of storing the conveyance containers in the storage units, changes the storage units from supply-suspended states to pre-storage supply states, and thereafter, stores the conveyance containers in the storage units. |
