发明名称 |
APPARATUS FOR PRODUCING SINGLE CRYSTAL, SINGLE CRYSTAL, METHOD FOR PRODUCING THE SINGLE CRYSTAL, WAFER, AND SEMICONDUCTOR DEVICE |
摘要 |
PROBLEM TO BE SOLVED: To provide: an apparatus for producing a single crystal, wherein a long single crystal that is less likely to cause flaws and cracks can be produced without increasing a processing cost and processing time: a method for producing the single crystal using the apparatus; and the single crystal and a wafer, both being produced by using such method.SOLUTION: A temperature gradient-controlling member 26a is arranged around a seed crystal 4, and then a local temperature gradient-relieving member 28a is arranged between the seed crystal 4 and the temperature gradient-controlling member 26a, wherein the local temperature gradient-relieving member has a function of relieving a maximal value of a temperature gradient caused in a region right above a growth axis direction of the seed crystal 4 in a single crystal 6 growing right above the seed crystal 4. The temperature gradient-controlling member 26a is arranged around the seed crystal 4 or the single crystal 6 so that, in a predetermined term from when at least the single crystal 6 starts growing till when the single crystal ends the growing, a temperature gradient may occur in which: a heat flows from the outside of the single crystal 6 toward the inside thereof in the vicinity of a growth face side of the single crystal 6; and the heat is released from the inside of the single crystal 6 toward the outside thereof in the vicinity of a seed crystal 4 side of the single crystal 6. |
申请公布号 |
JP2013139347(A) |
申请公布日期 |
2013.07.18 |
申请号 |
JP20110289966 |
申请日期 |
2011.12.28 |
申请人 |
TOYOTA CENTRAL R&D LABS INC;DENSO CORP;SHOWA DENKO KK;TOYOTA MOTOR CORP |
发明人 |
GUNJISHIMA TSUKURU;YAMADA MASANORI;KOBAYASHI MASAKAZU;ADACHI AYUMI |
分类号 |
C30B23/06;C30B29/36;C30B29/38 |
主分类号 |
C30B23/06 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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