CHARGED PARTICLE BEAM RADIATION DEVICE INCLUDING VACUUM VESSEL

摘要

PROBLEM TO BE SOLVED: To provide a charged particle beam radiation device which cools a sample or a sample table with a relatively simple structure.SOLUTION: A charged particle beam radiation device includes: a charged particle source; a sample table; and a driving mechanism having a transmission mechanism which transmits a drive force for moving the sample table. The charged particle beam radiation device has a vessel which is disposed in a vacuum chamber and may house an ionic liquid (12). The vessel is provided at a position that allows at least a part of the transmission mechanism to be immersed in the ionic liquid when the ionic liquid is housed. The charged particle beam radiation device is proposed as one embodiment for achieving the above object.