| 摘要 |
A simulation device and simulation program are provided that can be suitably applied to a manufacturing process including a plurality of processing steps. The simulation device is provided for simulating the manufacturing process including a first processing step using a first mask, and a second processing step using a second mask. The simulation device includes first obtaining means for obtaining a first intensity distribution generated over a substrate of interest for processing by the first mask, second obtaining means for obtaining a second intensity distribution generated over the substrate by the second mask, and revising means for revising an intensity of a region in the first intensity distribution to be processed by the second mask, to a value regarded as a region not to be processed, based on the second intensity distribution.
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