发明名称 METHOD OF FABRICATING MEMORY DEVICE
摘要 A method of fabricating a memory device comprises forming a plurality of first insulative blocks and a plurality of second insulative blocks arranged in an alternating manner in a substrate, forming a plurality of wide trenches in the substrate to form a plurality of protruding blocks, forming a word line on each sidewall of the protruding blocks, isolating the word line on each sidewall of the protruding block, and forming an trench filler in the protruding block to form two mesa structures, wherein the first insulative block and the second insulative block have different depths, and the wide trenches are transverse to the first insulative blocks.
申请公布号 US2013183809(A1) 申请公布日期 2013.07.18
申请号 US201313788497 申请日期 2013.03.07
申请人 NANYA TECHNOLOGY CORPORATION;NANYA TECHNOLOGY CORPORATION 发明人 CHUANG YING CHENG;HSU PING CHENG;YANG SHENG WEI;CHANG MING CHENG;TSAI HUNG MING
分类号 H01L21/762 主分类号 H01L21/762
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